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THE DEAN'S MESSAGE

2000-2001 HIGHLIGHTS

COLLEGE DEPARTMENTS


Biomedical Engineering
Chemical Engineering
Civil and Environmental Engineering
Electrical and Computer Engineering
Engineering Physics
Engineering Professional Development
Industrial Engineering
Materials Science and Engineering
Mechanical Engineering

INTERDISCIPLINARY DEGREE PROGRAMS

COLLEGE CONSORTIA

COLLEGE CENTERS

COLLEGE SERVICES

PRIVATE SUPPORT

2000-2001 FINANCIAL SUMMARY

FACULTY AND DEPARTMENT DIRECTORY

2001-2002 INDUSTRIAL ADVISORY BOARD

CREDITS

CENTER FOR NANOTECHNOLOGY

Franco Cerrina (Director)

3731 Schneider Road
Stoughton, WI 53589-3097

Tel: 608/263-4955
Fax: 608/262-0971
E-mail: cerrina@nanotech.wisc.edu

www.nanotech.wisc.edu

Paul Nealey (Associate Director)

3731 Schneider Road
Stoughton, WI 53589-3097

Tel: 608/265-8171
Fax: 877-2401
nealey@engr.wisc.edu

  • Works with the semiconductor and other industries in researching and developing the areas of next-generation lithographies (NGL), such as X-ray, E-beam and EUV.

  • Operates research beamlines on the 1GeV electron storage ring, Aladdin, at the UW-Madison Synchrotron Radiation Center.

  • Pursues research in mask technology, distortions and damage, resists, X-ray phase masks, X-ray optics and beamline design, and the applications of NGL lithography to silicon integrated circuits (CMOS) and micromechanics.

 



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Date last modified: Tuesday, 26-Feb-2002 14:54:00 CST
Date created: 26-Feb-2002
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