|
THE DEAN'S MESSAGE
2000-2001 HIGHLIGHTS
COLLEGE DEPARTMENTS
Biomedical Engineering
Chemical Engineering
Civil and Environmental Engineering
Electrical and Computer Engineering
Engineering Physics
Engineering Professional Development
Industrial Engineering
Materials Science and Engineering
Mechanical Engineering
INTERDISCIPLINARY DEGREE PROGRAMS
COLLEGE CONSORTIA
COLLEGE CENTERS
COLLEGE SERVICES
PRIVATE SUPPORT
2000-2001 FINANCIAL SUMMARY
FACULTY AND DEPARTMENT DIRECTORY
2001-2002 INDUSTRIAL ADVISORY BOARD
CREDITS
|
CENTER FOR PLASMA-AIDED MANUFACTURING
-
Provides "one-stop shopping" to assist industry in all aspects of
plasma-aided manufacturing.
-
Uses plasmas from less than 1 mTorr to greater than 1atm to modify
surface properties and materials in various manufacturing processes.
-
Develops plasma etching techniques for semiconductors and
non-semiconductor applications. Employs a variety of high-density
plasma and capacitive etch tools.
-
Develops plasma-based deposition of thin films using plasma chemical
vapor deposition and ionized physical vapor deposition as well as
plasma spray techniques.
-
Develops/maintains an excellent collection of gas-phase plasma
diagnostics.
|