Annual Report 2000: Engineering InterAction
College of Engineering / University of Wisconsin-Madison

Laboratory for Thin-Film Deposition

The Dean's Message

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2000-2001 Industrial Advisory Board

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1999-2000 Financial Summary

Faculty and Department Directory

College Publications


Max G. Lagally (Director)
1109 Engineering Research Building
1500 Engineering Drive
Madison, WI 53706-1687

Tel: 608/263-2078
Fax: 608/265-4118

  • Investigates fundamental mechanisms of thin-film growth using various thermal and plasma deposition methods; develops instrumentation to investigate growth processes in situ and in real time in hostile environments.

  • Emphasizes role of defects and impurities in growth, characterization of local atomic mechanisms involved in kinetics of growth, and theoretical studies of the growth process.

  • Designs and develops novel film structures and combinations of materials at the nanoscale; growth processes for semiconductors at the nanoscale; magnetic thin films, carbon nanotubes, and multi-layer films on polymers.


Copyright © 2000 University System Board of Regents


Published: September 2000