Annual Report 2000: Engineering InterAction
College of Engineering / University of Wisconsin-Madison

Center for NanoTechnology

The Dean's Message

College Departments

Biomedical Engineering

Chemical Engineering

Civil and Environmental Engineering

Electrical and Computer Engineering

Engineering Physics

Engineering Professional Development

Industrial Engineering

Materials Science and Engineering

Mechanical Engineering

Interdisciplinary Degree Programs

2000-2001 Industrial Advisory Board

College Consortia

College Centers

College Services

Private Support

1999-2000 Financial Summary

Faculty and Department Directory

College Publications

Credits


Franco Cerrina (Director)

3731 Schneider Road
Stoughton, WI 53589-3097

Tel: 608/263-4955
Fax: 608/262-0971
E-mail: cerrina@nanotech.wisc.edu

www.nanotech.wisc.edu

James W. Taylor (Associate Director)
110A KRC-SRC-Ednor M. Rowe Building
3731 Schneider Road
Stoughton, WI 53589-3097

Tel: 608/877-2403
Fax: 608/877-2401
E-mail: jwtaylo1@facstaff.wisc.edu

  • Works with the semiconductor and other industries in researching and developing the areas of next-generation lithographies (NGL), such as X-ray, E-beam and EUV.

  • Operates research beamlines on the 1GeV electron storage ring, Aladdin, at the UW-Madison Synchrotron Radiation Center.

  • Pursues research in mask technology, distortions and damage, resists, X-ray phase masks, X-ray optics and beamline design, and the applications of NGL lithography to silicon integrated circuits (CMOS) and micromechanics.


 

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Published: September 2000

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