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Works with the semiconductor and other industries in researching and
developing the areas of next-generation lithographies (NGL), such as
X-ray, E-beam and EUV.
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Operates research beamlines on the 1GeV electron storage ring,
Aladdin, at the UW-Madison Synchrotron Radiation Center.
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Pursues research in mask technology, distortions and damage, resists,
X-ray phase masks, X-ray optics and beamline design, and the
applications of NGL lithography to silicon integrated circuits (CMOS)
and micromechanics.
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