 |
 |
|
Center for Plasma-Aided Manufacturing
|
 |
|
|
|
-
Provides "one-stop shopping" to assist industry in all aspects of
plasma-aided manufacturing.
-
Uses plasmas from less than 1 mTorr to greater than 1atm to modify
surface properties and materials in various manufacturing processes.
-
Develops plasma etching techniques for semiconductors and
non-semiconductor applications. Employs a variety of high-density
plasma and capacitive etch tools.
-
Develops plasma-based deposition of thin films using plasma chemical
vapor deposition and ionized physical vapor deposition as well as
plasma spray techniques.
-
Develops/maintains an excellent collection of gas-phase plasma
diagnostics.
|
|
|
|
Copyright © 2000 University System Board of Regents
|
|
|
