Lagally, Max G.

Nanoscale properties of surfaces, interfaces, thin films, and dimensionally confined structures
Atom-scale mechanisms of film growth: Group IV semiconductors, nano-strain engineering, silicon nanomembranes
relationship of nanostructure to localized electronic and optoelectronic properties, quantum dots
Development of advanced instrumentation for growth and surface and interface studies, in particular diffraction, imaging, and scanned-probe microscopies
Bioarrays and biomolecular surface modification

Publications

Patents 1. "Low-Voltage Field Emission Gun", J. A. Martin and M. G. Lagally, patent # 4,427,886, January 24, 1984.

2. "Sensorless Control for Piezoelectric Positioners", S.H. Walker, R.D. Lorenz, and M.G. Lagally, patent # 5,714,831, February 3, 1998. (Licensed)

3. "Solid-State Quantum Dot Devices and Quantum Computing Using Nanostructured Logic Gates", M. A. Eriksson, M. G. Friesen, R. J. Joynt, M. G. Lagally, D. W. van der Weide, P. Rugheimer, and D. E. Savage, patent # 6,597,010, July 22, 2003.

4. "Stress Control of Semiconductor Microstructures for Thin Film Growth", A. Lal, C. H. Lee, P. Rugheimer, and M. Lagally, patent # 6,858,888, February 22, 2005.

5. "Methods and Apparata for Precisely Dispensing Microvolumes of Fluids", Bradley J. Larson, Chung Hoon Lee, Amit Lal, and M. G. Lagally, patent # 6,874,699, April 5, 2005. (Licensed)

6. "Deposition of Samples and Sample Matrix for Enhancing the Sensitivity of Matrix Assisted Laser Desorption/Ionization Mass Spectroscopy", D. M. Barnes, M. G. Lagally, B.J. Larson, and M.M. Vestling, patent # 7,095,018, August 22, 2006.

7. "Stress Control of Semiconductor Microstructures for Thin Film Growth", A. Lal, C. H. Lee, P. Rugheimer, and M. Lagally, patent # 7,109,121, September 19, 2006

8. "Fabrication of Silicon/Silicon-Germanium Heterojunction Structures". M.R. Roberts, D.E. Savage, and M.G. Lagally, patent # 7,229,901, June 12, 2007.

9. "Plasma-Enhanced Functionalization of Carbon-Containing Substrates", F. S. Denes, S. O. Manolache, L.E. Cruz-Barba, B. J. Larson, and M.G. Lagally, patent # 7,276,283, October 2, 2007.

10. "Method for Double-sided Processing of Thin-Film Transistors", H.-C. Yuan; Z.Q. Ma, G. Wang, P.G. Evans, M.A. Eriksson, and M.G. Lagally, patent # 7,345,809, April 8, 2008.

Papers 326. "Electronic Transport in Nanometre-Scale Silicon-on-Insulator Membranes", P. P. Zhang, E. Tevaarwerk, B.-N. Park, D.E. Savage, G.K. Celler, I. Knezevic, P.G. Evans, M.A. Eriksson, and M.G. Lagally, Nature 439, 703 (2006).

327. "Elastically Relaxed Free-Standing Strained-Si Nanomembranes", M.M. Roberts, L.J. Klein, D.E. Savage, M. Friesen, G.K. Celler, M.A. Eriksson, and M.G. Lagally, Nature Materials 5, 388 (2006).

332. "Double-Layer Based Electronic Nanodevices Fabricated on Silicon Nanoneedles", V.Joshkin, D. van der Weide, and M.G. Lagally, J. Appl. Phys. 100, 084329 (2006).

334. "Silicon Nanomembranes", M.G. Lagally, MRS Bulletin 32, 57 (2007). (invited)

335. "Elastically Strain Sharing Nanomembranes: Flexible and Transferable Strained Silicon and Silicon-Germanium Alloys", S.A. Scott and M.G. Lagally, J. Phys. D. (Applied Physics) 40, R1 (2007).

337. "Single-Crystal/Amorphous Multilayer Heterostructures Based on Membrane Transfer", Weina Peng, M.M. Roberts, E.P. Nordberg, F.S. Flack, P.E. Colavita, R.J. Hamers, D.E. Savage, M.G. Lagally, and M.A. Eriksson, Appl. Phys. Letters 90, 183107 (2007)

338. "Complementary Single-Crystal Silicon TFTs on Plastic", H.-C. Yuan, Z.Q. Ma, C.S. Ritz, D.E. Savage, M.G. Lagally, and G.K. Celler, ECS Trans. 6, 139 (2007).

341. "Silicon-on-Insulator for Symmetry-Converted Growth", Y. Fujikawa, Y. Yamada-Takamura, G. Yoshikawa, T. Ono, M. Esashi, P.P. Zhang, M.G. Lagally, and T. Sakurai, Appl. Phys. Letters 90, 243107 (2007).

342. "Structure of Elastically Strain-Shared Silicon (110) Nanomembranes", A. Opotowsky, S.A. Scott, D.E. Savage, and M.G. Lagally, New J. of Physics 9, 270 (2007).

343. "Routes Toward Lateral Self-Organization of Quantum Dots: The Model System SiGe on Si(001)", Ch. Teichert and M.G. Lagally, Ch.2 in Lateral Alignment of Epitaxial Quantum Dots, ed. Oliver G. Schmidt, Springer Series on Nanoscience and Technology 2007

344. "Directed Self-Assembly of Quantum Dots by Local Chemical Potential Control via Strain Engineering on Patterned Substrates", M-H Huang, Feng Liu, and M.G. Lagally, in Lateral Alignment of Epitaxial Quantum Dots, ed. Oliver G. Schmidt, Springer Series on Nanoscience and Technology 2007.

345. "Single-Electron Quantum Dot in Si/SiGe with Integrated Charge Measurement", C.B. Simmons, M. Thalakulam, N. Shaji, L.J. Klein, Hua Qin, R.H. Blick, D.E. Savage, M.G. Lagally, S.N. Coppersmith, and M.A. Eriksson, Appl. Phys. Letters 91, 213103 (2007).

346. "Thermally Processed High-Mobility MOS Thin-Film Transistors on Transferable Single-Crystal Elastically Strain-Sharing Si/SiGe/Si Nanomembranes", H-C. Yuan, M.M. Roberts, D.E. Savage, M.G. Lagally, G.K. Celler, and Z.Q. Ma, IEEE Transactions on Electron Devices 55, 810 (2008).

347. "Top-Gated Few-Electron Double Quantum Dot in Si/SiGe", N. Shaji, C.B. Simmons, L.J. Klein, H. Qin, D.E. Savage, M.G. Lagally, S.N. Coppersmith, R. Joynt, M. Friesen, R.H. Blick, and M.A. Eriksson, Physica E: Low-Dimensional Systems & Nanostructures 40, 520 (2008).

348. "Electronically Driven Structure Changes of Silicon Captured by Femtosecond Electron Diffraction", M. Harb, R. Ernstorfer, Ch. T. Hebeisen, G. Sciaini, Weina Peng, Th. Dartigalongue, M.A. Eriksson , M.G. Lagally, S.G. Kruglik, and R.J.D. Miller, Phys. Rev. Letters 100, 155504 (2008).

349. "Spin Blockade and Coherence Enhanced Transport in a Few-Electron Si/SiGe Double Quantum Dot", N. Shaji, C. B. Simmons, M. Thalakulam, L. J. Klein, H. Qin, H. Luo, D. E. Savage, M. G. Lagally, A. J. Rimberg, R. Joynt, M. Friesen, R. H. Blick, S. N. Coppersmith, and M. A. Eriksson, Nature Physics 4, 540 (2008).

351. "Plasma-enhanced synthesis of thin fluoropolymer layers with low Raman and fluores-cence backgrounds", Hongquan Jiang, M. K. Jantan, S. Manolache, F. S. Denes, and M. G. Lagally, Langmuir 24, 8672-8677 (2008).

352. "Influence of Strain on Band Structure in Strained Silicon Nanomembranes", C. Euaruksakul, Z. W. Li, F. Zheng, F. J. Himpsel, C. S. Ritz, B. Tanto, D. E. Savage, X. S. Liu, and M. G. Lagally, Phys. Rev. Letters 101, 147403 (2008).

353. "Silicon Nanomembranes Incorporating Strain and Mixed Crystal Orientations", S.A. Scott, D.M. Cottrill, D.E. Savage, and M.G. Lagally, ECS Proceedings 16, 215 (2008).

364. "Phonon Transport and Thermoelectricity in Silicon Nanostructures", H-J. Ryu, C. S. Ritz, L. J. Klein, H. F. Hamann, M. G. Lagally, and M. A. Eriksson, ECS Proceedings 16, 983 (2008).

365. "Flexible Photodetectors on Plastic Substrates by Use of Printing Transferred Single-Crystal Germanium Membranes", H.-C.Yuan, J.Y. Shin, G.X. Qin, L. Sun, P. Bhattacharya, M.G. Lagally, G.K. Celler, and Z.Q.Ma, Appl. Phy. Letters 94, 013102 (2009)

366. "Excitation of Longitudinal and Transverse Coherent Acoustic Phonons in Nanometer Free-Standing Films of (001)-Si", M. Harb, W. Peng, G. Sciaini, Ch.T. Hebeisen, R. Ernstorfer, M.A. Eriksson, M.G. Lagally, S. G. Kruglik, and R. J. D. Miller, Phys. Rev. B79 0194301 (2009)

367. "Nanomechanical Architectures --- Mechanics-Driven Fabrication Based on Crystalline Membranes", Feng Liu, M. G. Lagally, and Ji Zang, MRS Bulletin 34, 190 (2009)

368. "Mechano-electronic Superlattices in Silicon Nanomembranes", Minghuang Huang, C. S. Ritz, B. Novakovic, D.C.Yu, Yu Zhang, F. Flack, D. E. Savage, I. Knezevic, P. G. Evans, F. Liu, and M. G. Lagally, ACS Nano 3, 721 (2009).

369. "Control of island growth with mechanically responsive single-crystal nanomembrane substrates", H.-J. Kim-Lee, D.E. Savage, C.S. Ritz, M.G. Lagally, and K.T. Turner, Phys. Rev. Letters 102, 226103 (2009).

370. "Influence of Surface Chemical Modification on Charge Transport Properties in Ultra-thin Silicon Membranes", S. A. Scott, W. Peng, A. M. Kiefer, H.-Q. Jiang, I. Knezevic, D. E. Savage, M. A. Eriksson, and M. G. Lagally, ACS Nano 3, 1683 (2009).

Selected Awards, Honors and Societies

Elected to the National Academy of Engineering in 2000.
Elected to Fellowship in the American Association for the Advancement of Science (AAAS) in 1999.
Elected a member of the Deutsche Akademie der Naturforscher - Leopoldina (the German National Academy of Science) in 1999.
Outstanding Science Alumnus Award, Pennsylvania State University, 1996.
Davisson-Germer Prize, American Physical Society, 1995.
Welch Award, AVS, 1991.

Summary

Our research centers on the creation and the determination of nanoscale properties of surfaces, interfaces, thin films, and dimensionally confined structures, primarily those of the Group IV semiconductors. In particular we are investigating a new nanomaterial, silicon-based nanomembranes. We explore, both experimentally and theoretically, atom-scale mechanisms of film growth; the relationship of these mechanisms to the formation of novel surface and interface structures and nano-morphologies; and the relationship between such nano-morphologies and localized electronic and optoelectronic properties. An important component of our work is the development of advanced instrumentation for film growth and for surface and interface studies, in particular diffraction, surface imaging, and scanned-probe microscopies. An additional interest is biochemical surface modification, with an aim to combine biological materials with techniques of solid-state microfabrication and nanoscale characterization to explore concepts in biosensors.

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Copyright 2009 The Board of Regents of the University of Wisconsin System
Date last modified: 20-Oct-2009
Content by: lagally@engr.wisc.edu
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