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Max G. Lagally
Erwin W. Mueller Professor and Bascom Professor of Surface Science
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| Max G. Lagally |
| Max G. Lagally Erwin W. Mueller Professor and Bascom Professor of Surface Science
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| 1109 Engineering Research Building 1500 Engineering Drive Madison, WI 53706 |
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Tel: 608/263-2078 Fax: 608/265-4118 E-mail: lagally@engr.wisc.edu |
Patents 1. "Low-Voltage Field Emission Gun", J. A. Martin and M. G. Lagally, patent # 4,427,886, January 24, 1984.
2. "Sensorless Control for Piezoelectric Positioners", S.H. Walker, R.D. Lorenz, and M.G. Lagally, patent # 5,714,831, February 3, 1998. (Licensed)
3. "Solid-State Quantum Dot Devices and Quantum Computing Using Nanostructured Logic Gates", M. A. Eriksson, M. G. Friesen, R. J. Joynt, M. G. Lagally, D. W. van der Weide, P. Rugheimer, and D. E. Savage, patent # 6,597,010, July 22, 2003.
4. "Stress Control of Semiconductor Microstructures for Thin Film Growth", A. Lal, C. H. Lee, P. Rugheimer, and M. Lagally, patent # 6,858,888, February 22, 2005.
5. "Methods and Apparata for Precisely Dispensing Microvolumes of Fluids", Bradley J. Larson, Chung Hoon Lee, Amit Lal, and M. G. Lagally, patent # 6,874,699, April 5, 2005. (Licensed)
6. "Deposition of Samples and Sample Matrix for Enhancing the Sensitivity of Matrix Assisted Laser Desorption/Ionization Mass Spectroscopy", D. M. Barnes, M. G. Lagally, B.J. Larson, and M.M. Vestling, patent # 7,095,018, August 22, 2006.
7. "Stress Control of Semiconductor Microstructures for Thin Film Growth", A. Lal, C. H. Lee, P. Rugheimer, and M. Lagally, patent # 7,109,121, September 19, 2006
8. "Fabrication of Silicon/Silicon-Germanium Heterojunction Structures". M.R. Roberts, D.E. Savage, and M.G. Lagally, patent # 7,229,901, June 12, 2007.
9. "Plasma–Enhanced Functionalization of Carbon-Containing Substrates", F. S. Denes, S. O. Manolache, L.E. Cruz-Barba, B. J. Larson, and M.G. Lagally, patent # 7,276,283, October 2, 2007.
10. "Method for Double-sided Processing of Thin-Film Transistors", H.-C. Yuan; Z.Q. Ma, G. Wang, P.G. Evans, M.A. Eriksson, and M.G. Lagally, patent # February 2008.
Papers 316. "Germanium Hut Nanostressors on Freestanding Thin Silicon Membranes", P.G. Evans, D.S. Tinberg, M.M. Roberts, M.G. Lagally, Y. Xiao, B. Lai, and Z. Cai, Appl. Phys. Letters 87, 073112 (2005).
317. "Quantitative Analysis of Electric Force Microscopy: The Role of Sample Geometry," E. Tevaarwerk, D.G. Keppel, P.P. Rugheimer, M.G. Lagally, and M.A. Eriksson, Rev. Sci. Instrum. 76, 053707 (2005).
318. "N-type Thin-film Transistors Fabricated on Transferred, Elastically Strain-Shared Si/SiGe/Si Membranes", H.-C. Yuan, M.M. Roberts, D.E. Savage, M.G. Lagally, and Z.Q. Ma, 2005 International Semiconductor Device Research Symposium, IEEE, Piscataway, NJ, (2005) pg. 207.
319. "Mechanical Stability of Ultra Thin Ge/Si Film on SiO2: the Effect of the Si/SiO2 Interface", M.H. Huang, J.A. Nairn, M.G. Lagally, and Feng Liu, J. Appl. Phys. 97, 116108 (2005).
320. "Bending of Nanoscale Ultrathin Substrates by Growth of Strained Thin Films and Islands", M.H. Huang, P.P. Rugheimer, M.G. Lagally, and Feng Liu, Phys. Rev. 72, 085450 (2005).
321. "Cold-Plasma Modification of Oxide Surfaces for Covalent Biomolecule Attachment", B.J. Larson, J.M. Helgren, S.O. Manolache, M.G. Lagally, and F.S. Denes, Biosensors and Bioelectronics 21, 796 (2005).
322. "Photodetector Based on Network of Carbon Nanotubes on Decomposed SOI", H.-C. Yuan, B. Yang, J.M. Simmons, M.S. Marcus, Z.Q. Ma, M.A. Eriksson, and M.G. Lagally, Proc. SPIE 5971, 289-295 (2005).
323. "Formation of Micro Tubes from Strained SiGe/Si Heterostructures", H. Qin, N. Shaji, N.E. Merrill, H.S. Kim, R.C. Toonen, R.H. Blick, M.M. Roberts, D.E. Savage, M.G. Lagally, and G.K. Celler, New J. of Physics 7, 241 (2005).
324. "Self-Organization of Semiconductor Nanocrystals by Selective Surface Faceting", B. Yang, P.P. Zhang, D.E. Savage, M.G. Lagally, G.-H. Lu, M.-H. Huang, and Feng Liu, Phys. Rev. B 72, 235413 (2005).
325. "Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication", M.H. Huang, C. Boone, M.M. Roberts, D.E. Savage, M.G. Lagally, N. Shaji, H. Qin, R. Blick, J.A. Nairn, and Feng Liu, Adv. Mater. 17, 2860 (2005).
326. "Electronic Transport in Nanometre-Scale Silicon-on-Insulator Membranes", P. P. Zhang, E. Tevaarwerk, B.-N. Park, D.E. Savage, G.K. Celler, I. Knezevic, P.G. Evans, M.A. Eriksson, and M.G. Lagally, Nature 439, 703 (2006).
327. "Elastically Relaxed Free-Standing Strained-Si Nanomembranes", M.M. Roberts, L.J. Klein, D.E. Savage, M. Friesen, G.K. Celler, M.A. Eriksson, and M.G. Lagally, Nature Materials 5, 388 (2006).
328. "Charge transfer in the atomic structure of Ge (105)", Y. Fujikawa Y, T. Sakurai, and M.G. Lagally, Appl. Surface Sci. 252, 5244 (2006).
329. "High-Speed Strained-Single-Crystal Silicon Thin-Film Transistors on Flexible Polymers", H.C.Yuan, Z.Q. Ma, M.M. Roberts, D.E. Savage, and M.G. Lagally, J. Appl. Phys. 100, 013708 (2006).
330. "Electrical Conductivity in Silicon Nanomembranes", P.P. Zhang, E.P. Nordberg, B.-N. Park, G.K. Celler, I. Knezevic, P.G. Evans, M.A. Eriksson and M.G. Lagally, New Journal of Physics 8, 200 (2006).
331. "Polymer Light Emitting Diodes and Poly(di-n-octylfluorene) Thin Films as Fabricated with a Microfuidics Applicator", H. Cheun, P.P. Rugheimer, B.J. Larson, P. Gopalan, M.G. Lagally, and M.J. Winokur, J. Appl. Phys. 100, 073510 (2006).
332. "Double-Layer Based Electronic Nanodevices Fabricated on Silicon Nanoneedles", V.Joshkin, D. van der Weide, and M.G. Lagally, J. Appl. Phys. 100, 084329 (2006).
333. "Flexible Thin-Film Transistors on Biaxial- and Uniaxial-Strained Si and SiGe Membranes", H.-C. Yuan, G. Wang, Z.Q. Ma, M.M. Roberts, D.E. Savage, and M.G. Lagally, Semicond. Sci. Technol. 22, S72–S75 (2007).
334. "Silicon Nanomembranes", M.G. Lagally, MRS Bulletin 32, 57 (2007). (invited)
335. "Elastically Strain Sharing Nanomembranes: Flexible and Transferable Strained Silicon and Silicon-Germanium Alloys", S.A. Scott and M.G. Lagally, J. Phys. D. (Applied Physics) 40, R1 (2007) (invited).
336. "Strain Engineered Silicon Nanomembranes", M.G. Lagally, J. of Physics, Conference Series (JPCS) 61, 652 (2007). (invited)
337. "Single-Crystal/Amorphous Multilayer Heterostructures Based on Membrane Transfer", Weina Peng, M.M. Roberts, E.P. Nordberg, F.S. Flack, P.E. Colavita, R.J. Hamers, D.E. Savage, M.G. Lagally, and M.A. Eriksson, Appl. Phys. Letters 90, 183107 (2007)
338. "Complementary Single-Crystal Silicon TFTs on Plastic", H.-C. Yuan, Z.Q. Ma, C.S. Ritz, D.E. Savage, M.G. Lagally, and G.K. Celler, ECS Trans. 6, 139 (2007).
339. "X-ray Absorption Spectroscopy of Strained-Si Nanomembranes", C. Euaruksakul, Z. Li, D.E. Savage, and M.G. Lagally, ECS Trans. 6, 257 (2007).
340. "Ordered Lattices of Quantum Dots on Ultrathin SOI Nanomembranes", C.S. Ritz, F.S. Flack, D.E. Savage, D. Detert, P.G. Evans, M.G. Lagally, and Z.H. Cai, ECS Trans. 6, 321 (2007).
341. "Silicon-on-Insulator for Symmetry-Converted Growth", Y. Fujikawa, Y. Yamada-Takamura, G. Yoshikawa, T. Ono, M. Esashi, P.P. Zhang, M.G. Lagally, and T. Sakurai, Appl. Phys. Letters 90, 243107 (2007).
342. "Structure of Elastically Strain-Shared Silicon (110) Nanomembranes", A. Opotowsky, S.A. Scott, D.E. Savage, and M.G. Lagally, New J. of Physics 9, 270 (2007).
343. "Routes Toward Lateral Self-Organization of Quantum Dots: The Model System SiGe on Si(001)", Ch. Teichert and M.G. Lagally, Ch.2 in Lateral Alignment of Epitaxial Quantum Dots, ed. Oliver G. Schmidt, Springer Series on Nanoscience and Technology 2007
344. "Directed Self-Assembly of Quantum Dots by Local Chemical Potential Control via Strain Engineering on Patterned Substrates", M-H Huang, Feng Liu, and M.G. Lagally, in Lateral Alignment of Epitaxial Quantum Dots, ed. Oliver G. Schmidt, Springer Series on Nanoscience and Technology 2007.
345. "Single-Electron Quantum Dot in Si/SiGe with Integrated Charge Measurement", C.B. Simmons, M. Thalakulam, N. Shaji, L.J. Klein, Hua Qin, R.H. Blick, D.E. Savage, M.G. Lagally, S.N. Coppersmith, and M.A. Eriksson, Appl. Phys. Letters 91, 213103 (2007).
346. "Thermally Processed High-Mobility MOS Thin-Film Transistors on Transferable Single-Crystal Elastically Strain-Sharing Si/SiGe/Si Nanomembranes", H-C. Yuan, M.M. Roberts, D.E. Savage, M.G. Lagally, G.K. Celler, and Z.Q. Ma, IEEE Transactions on Electron Devices 55, 810 (2008).
347. "Top-Gated Few-Electron Double Quantum Dot in Si/SiGe", N. Shaji, C.B. Simmons, L.J. Klein, H. Qin, D.E. Savage, M.G. Lagally, S.N. Coppersmith, R. Joynt, M. Friesen, R.H. Blick, and M.A. Eriksson, Physica E: Low-Dimensional Systems & Nanostructures 40, 520 (2008).
348. "Electronically Driven Structure Changes of Silicon Captured by Femtosecond Electron Diffraction", M. Harb, R. Ernstorfer, Ch. T. Hebeisen, G. Sciaini, Weina Peng, Th. Dartigalongue, M.A. Eriksson , M.G. Lagally, S.G. Kruglik, and R.J.D. Miller, Phys. Rev. Letters 100, 155504 (2008).
Our research centers on the creation and the determination of nanoscale properties of surfaces, interfaces, thin films, and dimensionally confined structures, primarily those of the Group IV semiconductors. In particular we are investigating a new nanomaterial, silicon-based nanomembranes. We explore, both experimentally and theoretically, atom-scale mechanisms of film growth; the relationship of these mechanisms to the formation of novel surface and interface structures and nano-morphologies; and the relationship between such nano-morphologies and localized electronic and optoelectronic properties. An important component of our work is the development of advanced instrumentation for film growth and for surface and interface studies, in particular diffraction, surface imaging, and scanned-probe microscopies. An additional interest is biochemical surface modification, with an aim to combine biological materials with techniques of solid-state microfabrication and nanoscale characterization to explore concepts in biosensors.
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Copyright 2008 The Board of Regents of the University of Wisconsin System Date last modified: 03-May-2008 Content by: lagally@engr.wisc.edu Accessibility Web services Thank you for visiting http://www.engr.wisc.edu/mse/faculty/lagally_max.html |