MS&E 434: Introduction to Thin-Film Deposition Processes

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MS&E 434 - Introduction to Thin-Film Deposition Processes

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Catalog Description

434 Introduction to Thin-Film Deposition Processes. II,Alt Yrs; 3cr. Introduction to major thin-film deposition techniques and properties of thin films. Evaporation, plasma assisted processes with emphasis on sputter deposition, chemical vapor deposition ion beams. Film properties and characterization methods, applications. P:MS&E 330 and 351, or equiv.

Course Prerequisite(s)

MS&E 330
MS&E 351

Prerequisite knowledge and/or skills

Materials science
Structure of solids
Thermodynamics
Free energies

Textbook(s) and/or other required material

Instructor's handouts.

Course objectives

To develop fundamental understanding of major vapor phase thin-film deposition processes.

Topics covered

Introduction
Properties of thin-film coatings
Evaporation
Processes occurring in the presence of a plasma
Chemical vapor deposition
Summary

Class/laboratory schedule

Two 75-minute periods per week.

Contribution of course to meeting the professional component

This course contributes primarily to the students' knowledge of engineering topics, but does not provide design experience.

The following statement indicates which of the following considerations are included in this course: economic, environmental, ethical, political, societal, health and safety, manufacturability, sustainability.

Manufacturability

Relationship of course to undergraduate degree program objectives and outcomes

This course serves students in a variety of engineering majors. The information below describes how the course contributes to the college's educational objectives.

Provides background in an area of considerable industrial importance that is of interest to a variety of majors (e.g., ECE, ChE, EP, MS&E, ME).

Assessment of student progress toward course objectives

2 exams
8-10 homework sets, graded

Person(s) who prepared this description

Max G. Lagally

Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 04-Aug-2007
Content by: kailhofer@engr.wisc.edu
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