MEMS technology receives research boost

Xiaochun Li (16K JPG)

Assistant Professor Xiaochun Li has developed a new method for making extremely small, precision microelectro-mechanical systems (MEMS).

MEMS work as the "eyes and arms" of microelectronic systems, which rely on microelectronic integrated circuits to serve as the "brains" of the system.

Li's new method involves a laser-based micromanufacturing system that incorporates laser microdeposition and micromachining.

Li developed a micro powder-feeding mechanism that deposited micro stainless steel and copper powders though a tiny, microcapillary tube to produce microcomponents. He also used a laser to further enhance the production of the microcomponents.

Li says his goal with the new method is to manufacture three-dimensional microcomponents using alloys, metals and composite materials. "We can deal with any materials," he says, and thus provide a way to make MEMS beyond the traditional silicon-based systems. "The application is very broad."