A newsletter for alumni, students, and friends of the Mechanical Engineering Department at the University of Wisconsin-Madison
Roxann L. Engelstad
Professor Roxann L. Engelstad has been awarded a prestigious Romnes Faculty Fellowship covering a five-year period beginning July 1, 1997. She is one of ten recently tenured professors from UW-Madison who have been rewarded for early excellence in their fields.
The $50,000 fellowship is named in honor of H.I. Romnes, late trustee president of the Wisconsin Alumni Research Foundation (WARF). The funds are designed to provide younger tenured faculty with supplemental financial support for their research.
With her research at the Center for NanoTechnology, Engelstad has
become an international leader in the analysis of distortion in
lithographic processes used to pattern integrated circuits. She has
developed sophisticated computer models to simulate the mechanical and
thermal response of mask structures that are used to transfer patterns
to devices. Leading semiconductor companies, such as Motorola, IBM,
Lucent Technologies, SEMATECH, and Semiconductor Research Corporation,
are using her results to develop the next generation of integrated
ME Newsletter is a periodic publication of the University of
Wisconsin-Madison, Department of Mechanical Engineering. Correspondence should be sent to the address below.
Editor: Gail Gawenda
Designer: Lynda Litzkow
MAY 1997 Contents