MECHANICAL ENGINEERING DEPARTMENT MAY 1997 UNIVERSITY OF WISCONSIN-MADISON

A newsletter for alumni, students, and friends of the Mechanical Engineering Department at the University of Wisconsin-Madison

ME Professor Engelstad Wins Romnes Fellowship

Roxann L. Engelstad (32K JPG)

Professor Roxann L. Engelstad has been awarded a prestigious Romnes Faculty Fellowship covering a five-year period beginning July 1, 1997. She is one of ten recently tenured professors from UW-Madison who have been rewarded for early excellence in their fields.

Engelstad has become an international leader in the analysis of distortion in lithographic processes used to pattern integrated circuits.

The $50,000 fellowship is named in honor of H.I. Romnes, late trustee president of the Wisconsin Alumni Research Foundation (WARF). The funds are designed to provide younger tenured faculty with supplemental financial support for their research.

With her research at the Center for NanoTechnology, Engelstad has become an international leader in the analysis of distortion in lithographic processes used to pattern integrated circuits. She has developed sophisticated computer models to simulate the mechanical and thermal response of mask structures that are used to transfer patterns to devices. Leading semiconductor companies, such as Motorola, IBM, Lucent Technologies, SEMATECH, and Semiconductor Research Corporation, are using her results to develop the next generation of integrated circuits.

MAY 1997 Contents