Gregory F. Nellis Associate Professor Address/E-mail Program Affiliations Education Fields of Interest Publications Awards & Honors Current Research Projects

Contact Information

1339 Engineering Research Building 1500 Engineering Drive Madison, WI 53706-1687

Tel: 608/265-6626 Fax: 608/265-2316 E-mail: gfnellis@engr.wisc.edu

Program Affiliations

• Mechanical Engineering

• Computational Mechanics Center
• Solar Energy Laboratory

Education

• B.S. ME from UW-Madison in 1992 M.S. ME from M.I.T. in 1995 Ph.D. ME from M.I.T. in 1997

Fields of Interest

• cryogenic refrigeration systems including mixed gas JT systems, reverse-Brayton systems, pulse-tubes, and hybrid cryocoolers
• thermal-fluid problems in semiconductor manufacturing including immersion lithography, EUV lithography, and nanoimprint
• vortex tube theory and application
• refrigeration technology
• gas bearing supported turbomachinery

Publications

• S. Y. Baek, A. Wei, D. C. Cole, G. F. Nellis, M. Yeung, A. Abdo, and R. L. Engelstad, "Simulation of the coupled thermal/optical effects for liquid immersion micro-/nanolithography", submitted to the Journal of Microlithography, Microfabrication, and Microsystems, 2004.
• S. D. Schuetter, G. A. Dicks, B. F. Shulteis, G. F. Nellis, R. L. Engelstad, and E. G. Lovell, "Controlling Imprint Distortions in Step-and-Flash Imprint Lithography", submitted to the Journal of Vacuum Science and Technology, 2004.
• N. F. Aljuwayhel, G. F. Nellis, and S. A. Klein, "Parametric and Internal Study of the Vortex Tube using a CFD Model", accepted for publication in the International Journal of Refrigeration, September, 2003.
• A. Wei, A. Abdo, G. Nellis, R.L. Engelstad, J. Chang, E.G. Lovell, and W. Beckman, "Modeling fluid thermomechanical response for immersion lithography scanning", accepted by the Journal of Microelectronic Engineering 2004.
• F. Keppler, G. Nellis, and S. Klein, "Optimization of the Composition of a Gas Mixture in a Joule-Thomson Cycle", International Journal of Heating, Ventilation, Air Conditioning, and Refrigeration Research, to be published in the April 2004 volume.
• Alexander C. Wei, Gregory F. Nellis, Amr Y. Abdo, Roxann L. Engelstad, Cheng-fu Chen, Michael Switkes, and Mordechai Rothschild, 2004, "Microfluidic Simulation for Immersion Lithography", Journal of Microlithography, Microfabrication, and Microsystems, Vol. 3, No. 1, pp. 28-34.
• G. Nellis, and A. Wei, 2004, "Preliminary Analysis of Laser Pulse Induced Pressure Variation for Immersion Lithography", Journal of Microlithography, Microfabrication, and Microsystems, Vol. 3, No. 1, pp. 84-86.
• J. Chang, G. F. Nellis, R. L. Engelstad, and E. G. Lovell, 2003, "Wafer heating analysis for electron-beam projection lithography", accepted for publication in the Journal of Vacuum Science and Technology, B.
• Gregory F. Nellis, Amr Y. Abdo, Roxann L. Engelstad, and Eric P. Cotte, 2004, "Theoretical analysis of 157-nm hard pellicle system purification via a cyclic purge/fill process", Journal of Microlithography, Microfabrication, and Microsystems, Vol. 3, No. 1, pp. 122-129.
• G. F. Nellis, 2003, "A Heat Exchanger Model that Includes Axial Conduction, Parasitic Heat Load, and Property Variations", Cryogenics, Vol. 43, No. 9, pp. 523-538.
• G. F. Nellis, and J. R. Maddocks, 2003, "An Isothermal Model of a Hybrid Stirling/Reverse-Brayton Cryocooler", Cryogenics, Vol. 43, No. 1, pp. 31-43.
• G. F. Nellis, 2003, "Effectiveness-NTU Relations for Heat Exchangers with Streams Having Significant Kinetic Energy Variation", ASME Journal of Heat Transfer, Vol. 125, pp. 377-387.
• A. Wei, A. Abdo, G. Nellis, R. Engelstad, J. Chang, E. Lovell, and W. Beckman, 2003, "Simulating Fluid Flow Characteristics During the Scanning Processes for Immersion Lithography", Journal of Vacuum Science and Technology B, Vol. 21, No. 6.
• G. Nellis, M. Zagarola, and H. Sixsmith, 2001, "Analysis and Test of a Robust Sector Thrust Bearing for Cryogenic Applications", ASME Journal of Tribology, Vol. 123, pp. 768-776.
• W. L. Swift, M. V. Zagarola, G. F. Nellis, J. A. McCormick, H. Sixsmith, and J. A. Gibbon, 1999, "Developments in Turbo Brayton Technology for Low Temperature Applications", Cryogenics, Vol. 35, pp. 989-995.
• G. Nellis, and J. L. Smith, Jr., 1997, "Entropy Based Correction of Finite-Difference Predictions", Journal of Numerical Heat Transfer, Part B, Vol. 35, pp. 177 – 194.

Selected Awards, Honors and Societies

• American Society of Mechanical Engineers (ASME)
• American Society of Heating, Refrigerating, and Air-Conditioning Engineers (ASHRAE)
• Cryogenic Society of America (CSA)

Current Research Projects

Please visit either the Solar Energy Lab or Computational Mechanics Center web pages in order to learn more about the ongoing projects.

Copyright 2006 The Board of Regents of the University of Wisconsin System Date last modified: 03-Aug-2006 Content by: gfnellis@engr.wisc.edu Thank you for visiting http://www.engr.wisc.edu/me/faculty/nellis_gregory.html UPDATE PROFILE