College of Engineering University of Wisconsin-Madison
Materials Science The Fountain
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James W. Taylor

James W. Taylor

James W. Taylor
Professor

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    110A KRC-SRC-Ednor M. Rowe Building
    3731 Schneider Road
    Stoughton, WI 53589-3097
    Tel: 608/877-2403
    Fax: 608/877-2401
    E-mail: jwtaylo1@facstaff.wisc.edu

    Program Affiliations

    Education

    Fields of Interests

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    Summary

    Our active research projects span a wide range of materials-related topics, including:

    • the study of reactions and mechanisms of photo resists exposed to electron beams and X-rays;
    • studies of resist reactions at the resist/wafer interface; reactions of self-assembled monolayers to modify surface chemistry;
    • mechanisms and reactions of etching plasmas;
    • construction of micromechanical devices by X-ray lithography; and
    • exploration of the limits of nanolithography.

    The work is done at the Center for NanoTechnology using X-rays from the Aladdin electron storage ring at the Synchrotron Radiation Center. The electron beam instrument and the diagnostic instrumentation are also at the Synchrotron Radiation Center.




    Date last modified: Friday, 02-Sep-2011 10:20:14 CDT
    Content by: jwtaylo1@facstaff.wisc.edu

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