James W. Taylor Professor Address/E-mail Program Affiliations Education Fields of Interest Publications Summary

Contact Information

110A KRC-SRC-Ednor M. Rowe Building 3731 Schneider Road Stoughton, WI 53589-3097

Tel: 608/877-2403 Fax: 608/877-2401 E-mail: jwtaylo1@facstaff.wisc.edu

Program Affiliations

• Materials Science Program
• Chemistry

Education

• PhD, University of Illinois

Fields of Interests

• analytical measurements and instrumentation
• reactions of species at surfaces and interfaces
• reactions and control of photoresist reactions
• etching reactions and mechanisms related to microcircuit fabrication

Publications

• C.Nelson, S.Hector, W.Chu, P.Seese, M.Thompson, V.Pol, M.MclCord, J.Oberschmidt, and J.W.Taylor, Electrical Linewidth Measurements and Simulations Studying the Effects of Dose and Gap on Exposure Latitude in X-ray Lithography, Proc., SPIE, 2437 50-61 (1995).
• C.J.Gamsky, P.M.Dentinger, G.R.Howes, and J.W.Taylor, Quantitative Analysis of Chemically Amplified Photoresist Using Mirror-backed Infrared Reflection Absorption Spectroscopy, Proc. SPIE, 2438 143-152 (1995).
• J.W.Taylor, C.J.Gamsky, S.Rhyner, G.Howes, P.Dentinger, C.Nelson, C.Yang, and M.Reilly, Processing Control for 0.25 Micron X-ray Exposures of Commercially Available Resists: The Potential for Adaptive Control, J. Vac. Soc. Technol., in press (1996).
• P.M.Dentinger and J.W.Taylor, The Importance of the Chemistry at the Wafer-Resist Interface for Mechanical and Lithographic Adhesion, SPIE Proc. 2723 (1996).

Summary

Our active research projects span a wide range of materials-related topics, including:

• the study of reactions and mechanisms of photo resists exposed to electron beams and X-rays;
• studies of resist reactions at the resist/wafer interface; reactions of self-assembled monolayers to modify surface chemistry;
• mechanisms and reactions of etching plasmas;
• construction of micromechanical devices by X-ray lithography; and
• exploration of the limits of nanolithography.

The work is done at the Center for NanoTechnology using X-rays from the Aladdin electron storage ring at the Synchrotron Radiation Center. The electron beam instrument and the diagnostic instrumentation are also at the Synchrotron Radiation Center.