Office:3539 Engineering Hall Telephone:(608)
263-4955/(608)265-3811 E-Mail:cerrina@nanotech.wisc.edu
Research Interests:
Semiconductor
processing and device Metrology and characterization
X-ray applications:
optics, Lithography and microscopy
Advanced lithography
process simulation and optical modeling
Current
Projects:
Semiconductor
processing and device fabrication, in particular
lithography, and x-ray optics and technology)
Research has
a strong applied content and is currently focused
on manufacturing technologies for the sub - 100
um ULSI electron devices, such as post - optical
lithographies
The application
of X-rays to lithography for semiconductor manufacturing
and to microscopy for materials and biological science
Activities
include not only work with synchrotron X-rays, but
also metrology, electron beam and extreme UV lithography,
and atomic force microscopy
Created: July 1, 2002
Last Modified:
November 22, 2002
mse@engr.wisc.edu
