Engineering Physics  
Engineering Physics : Faculty :
Noah Hershkowitz

Noah  Hershkowitz

Noah Hershkowitz
Irving Langmuir Professor

  • Address/E-mail
  • Program Affiliations
  • Courses
  • Education
  • Fields of Interest
  • Publications
  • Awards & Honors
  • Summary

  • Contact Information

    Primary Address:

    337 Engineering Research Building
    1500 Engineering Drive
    Madison, WI 53706

    Tel: 608/263-4970
    Fax: 608/265-2364
    E-mail: hershkowitz@engr.wisc.edu

    Secondary Address:

    Room 101, 1410 Engieering Drive
    1410 Egineering Drive
    Madison, WI 53706

    Tel: 608/265- 2023
    Fax: 608/262-3632

    Departments

    Program Affiliations

    Courses

    Education

    Fields of Interest

    Selected Publications

    Selected Awards, Honors and Societies

    Summary

    Professor Hershkowitz is an experimental plasma physicist with current research interests in plasma-aided manufacturng, basic plasma physics, plasma diagnostics and in in RF effects inprocessing and in fusion plasmas,. He is Director of tge Center for Plasma-Aided manufacturing (C-PAM) and of the Phaedrus laboratory for Plasma Science which investigate plasma applications and basic science issues associated with colder plasmas (about 3 eV) respectively.

    C-PAM is investigating plasma etching, thin layer deposition and thick layer deposition using a large variety of plasma tools operating at pressures ranging from below 1mTorr to 1 atm. C-PAM also has a very extensive set of in-situ gas phase diagnostics. This Center is providing important input to U.S. industry.

    Phaedrus studies curently include Bohm presheath physics and helicon wave studies.




    Copyright 2006 The Board of Regents of the University of Wisconsin System
    Date last modified: Tuesday, 21-Sep-1999 11:37:39 CDT
    Content by: hershkowitz@engr.wisc.edu
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