J. Leon Shohet Professor Address/E-mail Program Affiliations Education Fields of Interest Publications Summary Files and Links

Contact Information

1441 Engineering Hall 1415 Engineering Drive Madison, WI 53706

Tel: 608/262-1191 E-mail: shohet@engr.wisc.edu

Program Affiliations

• Electrical and Computer Engineering

• Center for Plasma-Aided Manufacturing
• HSX Plasma Laboratory
• Materials Science Program
• Wisconsin Plasma Processing and Technology Research Consortium

Education

• PhD 1961, Carnegie Mellon University

Fields of Interest

• plasma-aided manufacturing
• controlled fusion
• nonlinear science
• effects of vacuum ultraviolet radiation on the processing of electronic materials
• biotechnology, especially biocompatible surfaces and directed differentiation of stem cells

Publications

• T.G.Snodgrass and J.L. Shohet, A Statistical Analysis of Copper Bottom Coverage of High Aspect Ratio Features using Ionized Physical Vapor Deposition, IEEE Transactions on Semiconductor Manufacturing 15, 30 (2002).
• C.Cismaru, J.L. Shohet, J.L. Lauer, R.W. Hansen, and S. Ostapenko, Depletion of Charge Produced during Plasma Exposure in Aluminum Oxide by Vacuum Ultraviolet Radiation, Applied Physics Letters 77, 3914 (2000).
• L. L Chu, K. Takahata, P. Selvaganapathy, Y.B. Gianchandani and J.L. Shohet, “A Micromachined Kelvin Probe with Integrated Actuator for Microfluidic and Solid-State Applications”, Journal of Micromechanical Systems 14 691-698 (2005)
• J.L. Lauer and J.L. Shohet, “Surface Potential Measurements of Vacuum Ultraviolet Irradiated Al2O3, Si3N4, and SiO2”, IEEE Transactions on Plasma Science, PS-33 248-249 (2005)
• F-K Tsai, J.L. Lauer and J.L. Shohet, “Aggregation of blood components on a surface in a microfluidic environment”, Journal of Applied Physics 99 024701 (2006)

Summary

Plasmas, gases to which enough energy has been added so that they become ionized, have two major applications: (1) treatment of materials and (2) fusion.

Plasmas are used for fabrication of microchips, hardening of tools, and the treatment of surfaces to improve their properties, for applications like tissue engineering and biocompatibility

The goal of fusion plasma research is to make a miniature star as a source of energy. Since plasmas are affected by electric and magnetic fields, we use these fields to produce a doughnut-shaped (toroidal) "magnetic bottle" for containment of the plasma.

Files and Links of Interest

• Plasma Processing & Technology Laboratory

Copyright 2006 The Board of Regents of the University of Wisconsin System Date last modified: Thursday, 26-Jan-2006 16:56:41 CST Content by: shohet@engr.wisc.edu UW-Madison : COE : ECE : ECE Site Map UPDATE PROFILE