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| Yogesh B. Gianchandani |
| Yogesh B. Gianchandani Associate Professor
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| 2436 Engineering Hall 1415 Engineering Drive Madison, WI 53706-1691 |
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Tel: 608/262-2233 Fax: 608/262-1267 E-mail: yogesh@engr.wisc.edu |
Partial List
C. Wilson and Y. Gianchandani, "In-Situ MicroPlasmas for Rapid Dry Etching of Silicon," Solid-State Sensors and Actuators Workshop (Hilton Head ‘00), Hilton Head Island, South Carolina, June '00
L. Chu, L. Que, and Y. Gianchandani, "Temperature Coefficients of Material Properties Using Differential Capacitive Strain Sensors," Solid-State Sensors and Actuators Workshop (Hilton Head ‘00), Hilton Head Island, South Carolina, June '00
J.-S. Park, L.L Chu, E. Siwapornsathain, A.D. Oliver, and Y. Gianchandani, "Long Throw and Rotary Output Electro-Thermal Actuators Based on Bent-Beam Suspensions," IEEE International Conference on Micro Electro Mechanical Systems (MEMS00), Miyazaki, Japan, Jan. '00
M.-H. Li and Y. Gianchandani, "High Performance Scanning Thermal Probe Using a Low Temperature Polyimide-Based Micromachining Process," IEEE International Conference on Micro Electro Mechanical Systems (MEMS00), Miyazaki, Japan, Jan. '00
L. Que, Y. Gianchandani, and F. Cerrina, "Mechanical Characterization of E-Beam Resist Using Micromachined Structures," Journal of Vacuum Science and Technology B, 17(6), Nov/Dec, 1999
J. Seefeldt, Y. Gianchandani, M. Mattes, L. Reimer "A Porous Si Process for Encapsulated Single Crystal, Surface Micromachined Microstructures," SPIE International Symposium on Micromachining and Microfabrication, Santa Clara, California, Sept. '99
J.-S. Park and Y. Gianchandani, "A Low Cost Batch-Sealed Capacitive Pressure Sensor," IEEE International Conference on Micro Electro Mechanical Systems (MEMS99), Orlando, Florida, Jan. '99
Y. Gianchandani and S. Crary, "Parametric Modeling of a Microaccelerometer: Comparing I- and D-Optimal Design of Experiments for Finite Element Analysis," IEEE/ASME Journal of Microelectromechanical Systems, vol. 7, no. 2, pp. 274-282, June 1998
Y. Gianchandani, M. Shinn, and K. Najafi, "Impact of High Thermal Budget Anneals on Polysilicon as a Micromechanical Material," IEEE/ASME Journal of Microelectromechanical Systems, vol. 7, no. 1, pp. 102-105, March 1998
Y. Gianchandani, H. Kim, M Shinn, B. Ha, B. Lee, K. Najafi, and C. Song, "A MEMS-First Fabrication Process for Integrating CMOS Circuits with Polysilicon Microstructures," Proc. Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS98), pp. 257-262, Heidelberg, Germany, Jan. '98
Y. Gianchandani and K. Najafi, "Scanning Thermal Profilers with Integrated Sensing and Actuation," IEEE Transactions on Electron Devices, in press, Nov. 1997
Y. Gianchandani and K. Najafi, "Bent-Beam Strain Sensors," IEEE/ASME Journal of Microelectromechanical Systems, vol. 5, no. 1, pp. 52-58, March 1996
Y. Gianchandani and K. Najafi, "Batch Assembled Multi-Level Micromachined Mechanisms from Bulk Silicon," IOP Journal for Micromechanics and Microengineering, vol. 2, pp. 80-85, 1992
B. Ziaie, Y. Gianchandani, and K. Najafi, "A High-Current IrOx Thin-Film Neuromuscular Microstimulator," Tech. Digest, International Conference on Solid-State Sensors and Actuators (Transducers), pp. 124-127, San Francisco, June '91
Prof. Gianchandani received a B.S. in 1984, an M.S. in 1986, and a Ph.D. in 1994, all in electrical engineering. He was with Xerox Corporation from 1985 to 1988, and with Microchip Technology from 1988 to 1989, working in the area of integrated circuit design. From 1994 to August 1997 he was a Research Fellow in the Center for Integrated Sensors and Circuits at the University of Michigan, Ann Arbor. Since then he has been with the University of Wisconsin, Madison, as an Assistant Professor in the Department of Electrical and Computer Engineering. Prof. Gianchandani received the National Science Foundation Career Award in 2000. He has served as a consultant to industry for the design and fabrication of a number of microelectromechanical devices. Prof. Gianchandani serves as a section editor for the journal 'Sensors and Actuators' and is a member of the steering committee of the IEEE International Conference on Micro Electro Mechanical Systems. He has published over 50 papers in various technical conferences and journals, and has several patents pending.
Photolithography-based manufacturing techniques that have evolved to meet the demands of the microelectronics industry can be used, with little or no modification, to fabricate mechanical devices and systems. This ability to micromachine various substrate and thin film materials opens up a vast field of interdisciplinary research. Micro-electro-mechanical systems (MEMS) developed on the basis of this technology promise to have a major impact in a number of different arenas.
My research focuses on the development of microsensors, microactuators, and integrated microsystems for automotive, aerospace, biomedical, data storage, industrial control, metrology, military, and other applications. Examples of devices in which I am interested include scanning probe microscopes; infrared, tactile, and other imagers; accelerometers and gyroscopes; pressure sensors; microstructures for material characterization; microfluidic components and systems; etc. The emphasis is on device and system design, including mechanical components and appropriate interface circuitry, and on the development of fabrication processes.
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Copyright 2005 The Board of Regents of the University of Wisconsin System Date last modified: Thursday, 26-Jun-2003 14:08:17 CDT Content by: yogesh@engr.wisc.edu UW-Madison : COE : ECE : ECE Site Map |
