ECE 549: Integrated Circuit Fabrication Laboratory

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ECE 549 - Integrated Circuit Fabrication Laboratory

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ECE 549: Integrated Circuit Fabrication Laboratory, Spring 2007 (Milicic, Srdjan), formerly Course Homepage of Milicic

ECE 549: Integrated Circuit Fabrication Laboratory, Spring 2004 (Jiang)

ECE 549: Integrated Circuit Fabrication Laboratory, Spring 2003 (Ma), formerly Course Homepage of Ma

ECE 549: Integrated Circuit Fabrication Laboratory, Spring 2002 (Cerrina)

ECE 549: Integrated Circuit Fabrication Laboratory, Spring 2001 (Lal)

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Catalog Description

549 Integrated Circuit Fabrication Laboratory. II; 3 cr. Monolithic integrated circuit fabrication; mask making, photolithography, oxidation, diffusion, junction evaluation, metallization, packaging, and testing. P: ECE 548 or cons inst.

Course Prerequisite(s)

ECE 548

Prerequisite knowledge and/or skills

Physics of semiconductor devices
Digital and analog circuit design
Mathematical modeling of semiconductor processing steps

Textbook(s) and/or other required material

Silicon VLSI Technology by J.D. Plummer, M.D. Deal, P.B. Griffin, published by Prentice Hall

Course objectives

This course exposes students to the design, fabrication and testing of a semiconductor chip in one semester. The students are responsible for all phases of the project, work in a group with a defined goal, draw on their entire technical background and produce an end result.

Topics covered

Introduction to modern CMOS technology
Semiconductor manufacturing
Lithography
Thermal oxidation
Dopant diffusion
Ion implantation
Thin film deposition
Etching
IC testing

Class/laboratory schedule

Three 50-minute lectures and one five-hour lab per week.

Contribution of course to meeting the professional component

This course contributes primarily to the students' knowledge of engineering topics, and does provide design experience.

The following statement indicates which of the following considerations are included in this course: economic, environmental, ethical, political, societal, health and safety, manufacturability, sustainability.

manufacturability

Relationship of course to undergraduate degree program objectives and outcomes

This course primarily serves students in the department. The information below describes how the course contributes to the undergraduate program objectives.

basic skill in methods of design and analysis across a broad range of electrical and computer engineering areas knowledge of measurement techniques and experimental procedures in core electrical and computer engineering applications advanced expertise in design, analysis, and fabrication techniques within a student-selected electrical and computer engineering concentration area strong skills in problem solving, leadership, and communication the ability to make thoughtful, well-informed career choices

Assessment of student progress toward course objectives

exams
lab reports

Person(s) who prepared this description

Daniel Cobb
Srdjan Milicic

Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 18-Jul-2007
Content by: ece@engr.wisc.edu
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