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- Catalog Description
- 549 Integrated Circuit Fabrication Laboratory. II; 3
cr. Monolithic integrated circuit
fabrication; mask making, photolithography, oxidation,
diffusion, junction evaluation, metallization,
packaging, and testing. P: ECE 548 or cons inst.
- Course Prerequisite(s)
- Prerequisite knowledge and/or skills
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Physics of semiconductor devices
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Digital and analog circuit design
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Mathematical modeling of semiconductor processing steps
- Textbook(s) and/or other required material
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Silicon VLSI Technology by J.D. Plummer, M.D. Deal, P.B. Griffin, published by Prentice Hall
- Course objectives
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This course exposes students to the design, fabrication and testing of a semiconductor chip in one semester. The students are responsible for all phases of the project, work in a group with a defined goal, draw on their entire technical background and produce an end result.
- Topics covered
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Introduction to modern CMOS technology
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Semiconductor manufacturing
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Lithography
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Thermal oxidation
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Dopant diffusion
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Ion implantation
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Thin film deposition
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Etching
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IC testing
- Class/laboratory schedule
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Three 50-minute lectures and one five-hour lab per week.
- Contribution of course to meeting the professional component
- This course contributes primarily to the students' knowledge of engineering topics, and does provide design experience.
The following statement indicates which of the following considerations are included in this course: economic, environmental, ethical, political, societal, health and safety, manufacturability, sustainability.
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- Relationship of course to undergraduate degree program objectives and outcomes
- This course primarily serves students in the department. The information below describes how the course contributes to the undergraduate program objectives.
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basic skill in methods of design and analysis across a broad range of electrical and computer engineering areas
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knowledge of measurement techniques and experimental procedures in core electrical and computer engineering applications
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advanced expertise in design, analysis, and fabrication techniques within a student-selected electrical and computer engineering concentration area
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strong skills in problem solving, leadership, and communication
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the ability to make thoughtful, well-informed career choices
- Assessment of student progress toward course objectives
- Person(s) who prepared this description
