ECE 310: Plasma Laboratory

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ECE 310 - Plasma Laboratory

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Catalog Description

310 Plasma Laboratory. Irr; 1 cr. Vacuum systems, thermocouple and ionization guages, plasma production by AC, DC and rf. Measurement of plasma density and temperature. Introduction to engineering problems of controlled fusion. Demonstrations and field trips to plasma experiments on the Madison campus. P: ECE 271; ECE 320 or cons inst.

Course Prerequisite(s)

ECE 271
ECE 320

Prerequisite knowledge and/or skills

Familiarity with basic laboratory measurement apparatus (oscilloscope, signal generator, voltage/current/capacitance meters, etc.);
Familiarity with wave progration and related topics of electrodynamics.

Textbook(s) and/or other required material

Textbook: None

Reference: Introduction to Plasma Physics and Controlled Fusion, Chen. Glow Discharge processes, Chapman. Plasma Diagnostics, Auciello Flamm. A User's Guide to Vacuum Technology, O'Hanlon.

Course objectives

Develop skills in basic laboratory measurement techniques employed in plasma processing.

Topics covered

The Langmuir Probe.
Vacuum Fundamentals.
Magnetic Mirror Device.
Harmonic Ratio Method of Determining Electron Temperature.
Microwave Interferometry.
Plasma Surface Modification of Polystyrene.

Class/laboratory schedule

Six laboratory sessions, one for each lab topic outlined above.

Contribution of course to meeting the professional component

This course contributes primarily to the students' knowledge of engineering topics, but does not provide design experience.

The following statement indicates which of the following considerations are included in this course: economic, environmental, ethical, political, societal, health and safety, manufacturability, sustainability.

Issue of manufacturability relating to plasma processing of materials; Economic issues relating to plasma processing of materials; Laboratory practice for health and safety.

Relationship of course to undergraduate degree program objectives and outcomes

This course primarily serves students in the department. The information below describes how the course contributes to the undergraduate program objectives.

ability to apply methods of calculus, differential equations and the physical sciences to problems in electrodynamics ability to apply techniques of physics and materials science to predict behavior of microelectronic devices and structures ability to extract a well-posed electrical and computer engineering design problem from more broadly specified system goals

Assessment of student progress toward course objectives

Detailed laboratory reports associated with each experiment are graded to provide progressive feedback to students through the sequence of lab exercises.

Person(s) who prepared this description

J. Leon Shohet

Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 16-Jul-2007
Content by: ece@engr.wisc.edu
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