Log in to the scheduling calendar * to reserve time on these tools:

• Metal Evaporator (CHA E-beam)

• Angstrom E-beam Evaporator (Metals)

• Telemark E-beam Evaporator (Dielectrics)

• CVC 601 DC Sputterer (Metals)

• STS Multiplex ICP Etch

Check the Clean Room Equipment Security System (CRESS) to see which tools are currently in use.

* Before you can log in to the scheduling calendar for the first time, you need to request access by contacting WCAM.

Copyright 2009 The Board of Regents of the University of Wisconsin System Date last modified: 07-Jun-2011 10:50:02 Date created: 30-Oct-2001 Content by: rabauer@facstaff.wisc.edu Accessibility Web services