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Indium Evaporator

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Indium Evaporator

Process Description:
Evaporation is a physical vapor deposition process performed in a vacuum environment. The deposition is from a thermal vaporization source with no gas, such as argon, to scatter the atoms or molecules. The trajectory of the vaporized material is "line-of-sight."
Equipment Description:
This Indium Evaporator consists of a 12" X 8" Pyrex Bell jar, a 14" stainless steel base plate outfitted with 2ea high current feed-thrus, filament fixture clamps, an ion gauge port, a thermocouple gauge port and one spare port, a manual counterbalanced hoist, and bell jar cage. Main system components consist of a Leybold D30 roughing pump and a Leybold TMP450 Turbo Pump with an Ultek Auto Pumpdown Control, a GE 2 KVA 12/24 volt filament transformer, and a Granville-Phillips Mdl 270004 Ion Gauge with dual thermocouple outputs. A main control panel is equipped with filament current metering, and open circuit filament voltage metering, a 20A main vacuum pump breaker, and a 15A filament power circuit breaker.

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Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 26-Dec-2001
Date created: 26-Dec-2001
Content by: rabauer@facstaff.wisc.edu
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