Wisconsin Center for Applied Microelectronics

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Cost Recovery Rates, 2009-2010

UW Internal Rates

Training	Access	Clean Room Hourly Rate	Special Equipment	Exceptional Equipment	Recharge Cap per User (all fees excluding the Access fee but including Hourly)	Staff Time
$200	$40/month	$36/hour	$30/hour	$45/hour	$600/month	—

Terms: Rates are effective July 1, 2009 to June 30, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

Other Academic Institution Rates

Training	Access	Clean Room Hourly Rate	Special Equipment	Exceptional Equipment	Recharge Cap per user — All fees excluding the Access fee but including Hourly)	Staff Time
$272	$40/month	$54/hour with no cap	$45/hour	$67/hour	$900/month	—

Terms: Rates are effective July 1, 2009 to June 30, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

External Rates

Training	Access	Clean Room Hourly Rate	Special Equipment	Exceptional Equipment	Recharge Cap per user — All fees excluding the Access fee but including Hourly)	Staff Time
$500 per new user start	$50/month	$90/hour with no cap	$75/hour	$112.50/hour	No cap	$185/hour with no cap

Terms: Rates are effective July 1, 2009 to June 30, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

Equipment

Special

PlasmaTherm 70 RIE and PECVD
Unaxis 790 RIE
Trion Phantom RIE
CVC-601 Sputter Deposition
CHA Metal Evaporator
Dielectric Evaporator
Thermal Oxidation

Exceptional

Ion Implant
PlasmaTherm 770 ECR (3-5 etcher)
PlasmaTherm 770 ICP (metal etcher)
Trion Minilock
STS ICP
LPCVD Poly
LPCVD Nitride
LTO

Noted systems available under the lab entrance only (NO extra equipment charge):

Lithography spin coat, Lithography contact aligners, Lithography develop
All wet benches and wet chemicals
Dicing Saws, Wire Bonders
All analysis tools: film thickness, step height, film stress, 4pt probe, etc.

Copyright 2009 The Board of Regents of the University of Wisconsin System
Date last modified: 24-Aug-2009 12:54:06
Date created: 21-Jun-2007
Content by: rabauer@facstaff.wisc.edu
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