University of Wisconsin-Madison Wisconsin Center for Applied Microelectronics College of Engineering University of Wisconsin-Madison Wisconsin Center for Applied Microelectronics
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Cost Recovery Rates, 2009-2010

UW Internal Rates

Training Access Clean Room Hourly Rate Special Equipment Exceptional Equipment Recharge Cap per User (all fees excluding the Access fee but including Hourly) Staff Time
$200 $40/month $36/hour $30/hour $45/hour $600/month

Terms: Rates are effective July 1, 2009 to June 30, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

Other Academic Institution Rates

Training Access Clean Room Hourly Rate Special Equipment Exceptional Equipment Recharge Cap per user — All fees excluding the Access fee but including Hourly) Staff Time
$272 $40/month $54/hour with no cap $45/hour $67/hour $900/month

Terms: Rates are effective July 1, 2009 to June 30, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

External Rates

Training Access Clean Room Hourly Rate Special Equipment Exceptional Equipment Recharge Cap per user — All fees excluding the Access fee but including Hourly) Staff Time
$500 per new user start $50/month $90/hour with no cap $75/hour $112.50/hour No cap $185/hour with no cap

Terms: Rates are effective July 1, 2009 to June 30, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

Equipment

Special

PlasmaTherm 70 RIE and PECVD
Unaxis 790 RIE
Trion Phantom RIE
CVC-601 Sputter Deposition
CHA Metal Evaporator
Dielectric Evaporator
Thermal Oxidation

Exceptional

Ion Implant
PlasmaTherm 770 ECR (3-5 etcher)
PlasmaTherm 770 ICP (metal etcher)
Trion Minilock
STS ICP
LPCVD Poly
LPCVD Nitride
LTO

Noted systems available under the lab entrance only (NO extra equipment charge):




Copyright 2009 The Board of Regents of the University of Wisconsin System
Date last modified: 24-Aug-2009 12:54:06
Date created: 21-Jun-2007
Content by: rabauer@facstaff.wisc.edu
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