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| Cost Recovery Rates, 2007-2008 |
| Training | Clean Room Locker | Clean Room Access | Standard Equipment | Special Equipment | Exceptional Equipment |
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| $200 per new user start | $20/month per storage unit | $36/hour with a cap of 200 hours for each user | No additional fee | $30/hour with no cap | $45/hour with no cap |
Terms: Rates are effective July 1, 2007 to June 30, 2008. A user is a single, unique, individual person; multiple persons cannot be one user.
| Training | Key | Clean Room Access | Standard Equipment | Special Equipment | Exceptional Equipment | $500 per new user start | $50/month that a user is active in the system | $90/hour with no cap | No additional fee | $75/hour with no cap | $112.50/hour with no cap |
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Terms: Rates are effective July 1, 2007 to June 30, 2008. A user is a single, unique, individual person; multiple persons cannot be one user.
Standard equipment is available as part of the laboratory entrance fee. There is no extra equipment charge.
Lithography spin coat
Lithography contact aligners
Lithography develop
All wet benches and wet chemicals
Dicing saws, wire bonders
All analysis tools: film thickness, step height, film stress, 4pt probe, etc.
PlasmaTherm 70 RIE and PECVD
Unaxis 790 RIE
Trion Phantom RIE
CVC-601 Sputter Deposition
CHA Metal Evaporator
Dielectric Evaporator
Thermal Oxidation
Ion Implant
PlasmaTherm 770 ECR (3-5 etcher)
PlasmaTherm 770 ICP (metal etcher)
Trion Minilock
STS ICP
LPCVD Poly
LPCVD Nitride
LTO
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Copyright 2007 The Board of Regents of the University of Wisconsin System Date last modified: 27-Jun-2007 Date created: 21-Jun-2007 Content by: rabauer@facstaff.wisc.edu Accessibility Web services Thank you for visiting http://www.engr.wisc.edu/centers/wcam/fees.html |