Wisconsin Center for Applied Microelectronics

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Cost Recovery Rates 2011

UW Internal Rates

Training	Access	Clean Room Hourly Rate	Special Equipment	Exceptional Equipment	Recharge Cap per User (all fees excluding the Access fee but including Hourly)	Staff Time
$200	$40/month	$37/hour	$31/hour	$46/hour	$650/month	$62/hour

Terms: Rates are effective as of December 1st, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

Other Academic Institution Rates

Training	Access	Clean Room Hourly Rate	Special Equipment	Exceptional Equipment	Recharge Cap per user — All fees excluding the Access fee but including Hourly)	Staff Time
$272	$40/month	$55/hour with no cap	$47/hour	$68/hour	NO CAP	$90/hour

Terms: Rates are effective as of December 1st, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

External Rates

Training	Access	Clean Room Hourly Rate	Special Equipment	Exceptional Equipment	Recharge Cap per user — All fees excluding the Access fee but including Hourly)	Staff Time
$500 per new user start	$50/month	$92/hour with no cap	$77/hour	$115/hour	NO CAP	$185/hour with no cap

Terms: Rates are effective as of December 1st, 2010. A user is a single, unique, individual person; multiple persons cannot be one user.

Material Charges

Gold: $50/gram

Equipment Categories

Special

PlasmaTherm 70 RIE and PECVD
Unaxis 790 RIE
Trion Phantom RIE
CVC-601 Sputter Deposition
CHA Metal Evaporator
Dielectric Evaporator
Thermal Oxidation

Exceptional

PlasmaTherm 770 ECR (3-5 etcher)
PlasmaTherm 770 ICP (metal etcher)
Trion Minilock
STS ICP
LPCVD Poly
LPCVD Nitride
LTO

No additional charge

These systems are made available under the lab entrance fee, and incur no additional equipment charge:

Lithography spin coat, Lithography contact aligners, Lithography develop
All wet benches and wet chemicals
Dicing Saws, Wire Bonders
All analysis tools: microscopes, digital cameras, film thickness, step height, film stress, 4pt probe, etc.

Copyright 2011 The Board of Regents of the University of Wisconsin System
Date last modified: 05-Jan-2011
Date created: 21-Jun-2007
Content provided by Jon McCarthy: jjmccarthy@wisc.edu
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