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Aluminum Anneal Tube

Operating procedures are available.

Aluminum Anneal Tube

Process Description:
In the fabrication of integrated circuits, metal interconnecting features are deposited. To improve the mechanical and electrical properties of the metal, the substrate is heated. An aluminum alloy is commonly used. When heated, the aluminum forms a low resistance contact with silicon by reducing native oxide and forming a thin layer of aluminum oxide that promotes adhesion between the silicon dioxide and aluminum.

System Description:
The aluminum anneal system is the lower left tube in the Thermco furnace stack. The system is a horizontal quartz tube within a 3-zone heating element. Nitrogen and forming gas as passed into the tube via a mass flow controller. Furnace temperature is controlled via an analog dial on the system.
Gases:

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Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 31-Oct-2001
Date created: 31-Oct-2001
Content by: rabauer@facstaff.wisc.edu
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