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Tencor Alphastep 200 Profilometer

Operating procedures are available.

Tencor Alphastep 200 Profilometer

A profilometer is a non-destructive, easy-to-use for step measurement. A diamond-tipped stylus is in direct contact and is scanned across the surface. The resolution of the measurement is dependent on the radius of the stylus and the geometries of the features.

Process Description:
A profilometer is a non-destructive, easy-to-use for step measurement. A diamond-tipped stylus is in direct contact and is scanned across the surface. The resolution of the measurement is dependent on the radius of the stylus and the geometries of the features.
Equipment Description:
The AlphaStep 200 is equipped with a standard stylus of 12.5 micron radius. Sample leveling will be automatically computed after scan. The scan area is imaged on a high-contrast, 9-inch CRT.
Maximum sample thickness16.5 mm
Maximum sample diameter162 mm
KiloAngstrom modemaximum range ±160 kiloAngstrom, resolution 5 Angstrom
Micron modemaximum range ±160 microns, resolution 5 nanometers
Scan lengths80, 400, 2,000, 10,000 microns

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Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 28-Aug-2001
Date created: 28-Aug-2001
Content by: rabauer@facstaff.wisc.edu
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