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Telemark E-Beam Evaporator, Dielectrics

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Telemark E-Beam Evaporator, Dielectrics

Process Description:
Evaporation is a physical vapor deposition process performed in a vacuum environment. The deposition is from a thermal vaporization source with no gas, such as argon, to scatter the atoms or molecules. The trajectory of the vaporized material is "line-of-sight."
System Description:
The Telemark is a focussed electron-beam evaporation system. The focussed e-beam is directed into the material crucibles to heat the material until vaporization or sublimation. The hearth is designed to hold four 15cc crucibles. This evaporation system has one stationary substrate holder. The high vacuum is achieved by a cryo-pump. A crystal oscillator is used to monitor film thickness in-situ.
Materials available are:

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Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 20-Jul-2001
Date created: 20-Jul-2001
Content by: rabauer@facstaff.wisc.edu
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