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| Superior AFPP 300upg Four-Point Probe |
Process Description:
A four-point probe is an instrument to measure the thin-film resistivity or sheet resistance of a substrate surface.
Four-point probes are available in several geometries with the most common being collinear.
A collinear probe will pass current between two outer probes and measure the voltage across the inner pair.
The resistance is determined from the ratio of the voltage drop to the forced current and includes a dependence on the probe geometry and probe spacing.
Equipment Description:
The Automatic Four-Point Probe System (AFPP) by Superior Electronics is capable of automatically measuring resistivity of a substrate surface.
The system utilizes a Fell probe head and a personal computer to control measurements.
The system is capable of:
- Measuring wafers up to 6 inches (150mm)
- Radial profiling providing 1-2 center readings
- ASTM five-point and nine-point readings
- SEMI five and nine-point, signal radial and multi-radial
- Manual programming of reading points
The AFPP is equipped with a standard space 0.050 inch K&S Fell collinear probe head.
The AFPP reports can be configured to display various numerical data categories and color mapping of the results.
A HP Deskjet printer is available for report printout.
System specifications are:
| Range: | .001 ohm-cm to 1000 ohm-cm, N or P-type |
| Precision: | ±1.0% |
| Accuracy:: | ±0.05% |
| Repeatability: | ±0.1% |
| Layer thickness: | 0.3 microns minimum |
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Copyright 2007 The Board of Regents of the University of Wisconsin System
Date last modified: 21-Oct-2002
Date created: 21-Oct-2002
Content by: rabauer@facstaff.wisc.edu
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