Tel: 608/263-2078
Fax: 608/265-4118
E-mail: lagally@engr.wisc.edu

• Investigates fundamental mechanisms of thin-film growth using various thermal and plasma deposition methods; develops instrumentation to investigate growth processes in situ and in real time in hostile environments.

• Emphasizes role of defects and impurities in growth, characterization of local atomic mechanisms involved in kinetics of growth, and theoretical studies of the growth process.

• Designs and develops novel film structures and combinations of materials at the nanoscale, growth processes for semiconductors at the nanoscale, and multi-layer films on polymers.

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